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公共技术系列讲座七十
 
题目: Properties and use of Non Evaporable Getters (NEG) pumps to achieve UHV-XHV conditions in scientific and industrial applications
时间: 2017年03月31日 09:30
地点: 中科院物理所D楼211室
报告人: Dr. Paolo Manini

SAES Getters SpA.

Abstract:
Non Evaporable Getters (NEGs) are very reactive alloys, generally made of zirconium or titanium, able to sorb gases very efficiently in a vacuum system. Gas molecules are dissociated on the getter surface and permanently trapped in the form of stable oxides, carbides or nitrides. Hydrogen, which has a small atomic radius, can quickly diffuse in the getter bulk even at room temperature, making NEG the ideal solution for H2 absorption. NEG materials can be assembled into high efficiency pumps, whose structures and properties are optimized to provide extremely high pumping speed for all active gases in UHV and XHV regime. Compared to other vacuum pumps, NEG pumps have several unique features which we will talk about in the lecture. NEG pumps are currently applied in many industrial and research applications, such as scanning electron/transmission microscopy, electron beam lithography, semiconductor processing, thin film deposition, surface science and etc.

Speaker:
Dr. Paolo Manini was born in Italy in 1959. Physicist by education with a strong technical background in vacuum, getter technology and material science, consolidated over 13 year experience as R&D Scientist and Laboratory Manager at SAES Getters SpA. Since 2008 he is Business Manager with the task of generating new products and innovative concepts related to vacuum pumps and getter products for thermal insulation. He hold 24 granted patents and have more than 35 scientific papers on getter pumps, getter technology, material science and vacuum insulation. He had been Vice–President of the Italian Vacuum Association from 2004 to 2008 and President from 2008 to 2012. Recipient of the R&D 100 award in 2012 for the development of the NEXTorr D100 combination pump.

主办:中科院物理所技术部电子学仪器部
邀请人:郇  庆    联系电话:82649096  
E-mail: ts01service@iphy.ac.cn


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